More than 30% energy saving in comparison with general equipment (RTO/RCO/concentration system), regeneration time is shorter.This equipment consists of reactor, VOCs adsorbent, microwave heating template, VOCs oxidation system.Consists of two or more reactors, One reactor adsorbs, other reactors removed VOCs by regenerative cooling reaction.The product can be applied to conductors and LCD manufacturing process/coating process/oil chemistry factory.